Dimension
|
Square
|
Tolerance
|
Measuring tools
|
Remarks
|
L(mm)
|
L
|
>-3
|
calliper or tape
|
L,W,T represents length, width and thickness of the square.
|
W(mm)
|
W
|
>-3
|
calliper or tape
|
|
T(mm)
|
T
|
>-1
|
calliper
|
Part
|
Back
|
Sputtering surface
|
The side and other surfaces
|
Ra(μm)
|
0.8-1.6
|
0.8-1.6
|
3.2
|